PEABODY SCIENTIFIC

Duoplasmatron SF5+ Ion Source System for Cameca SIMS Units

Model PS-100HIS


Features






Applications





General

















  • Heavy Ions including SF5+, F+, Ar+, CF4+, O+
  • High Beam Stability
  • > 150 hours Filament Lifetime
  • No Modifications to Existing SIMS Unit

  • Enhanced Deth Resolution for Depth Profiling of Shallow Junctions and Implants
  • Higher Ionization Probabilities for Elements that form Weak Oxide Bonds
  • Characterization of Oxygen in Insulators
  • Increased Desorption of Organic Molecules